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Micro Drilling

High-Precision Drilling Across All Materials

Overview

Laser drilling of metal alloys offers exceptional quality and precision for a wide range of applications, including fuel delivery systems, various filters, and functional surfaces. Key advantages include fast processing speed, high accuracy, and excellent surface finish.

Physical Principle

Femtosecond pulses enable percussion drilling (single-pulse) and trepanning (circular motion) with zero heat-affected zone. Nonlinear absorption allows drilling in transparent materials, while high peak power enables processing of any metal without thermal stress.

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Micro Drilling

Microscope images of holes drilled with GHz-burst femtosecond laser in sodalime glass (top row: a-d, 100 μm depth) and fused silica (bottom row: e-h, 75 μm depth) with varying pulse numbers per burst (36, 70, 100, and 130 ppb). Note the excellent hole quality with smooth, glossy inner surfaces and cylindrical morphology, demonstrating crack-free percussion drilling in glasses. Reproduced from Balage et al., Micromachines 2023, 14(6), 1158. © 2023 by the authors. Licensed under CC BY 4.0.

Technical Capabilities

✓Hole diameters: 1 μm to 500 μm
✓Aspect ratios up to 100:1 (depth:diameter)
✓Zero-taper cylindrical holes
✓Percussion and trepanning modes
✓Glass drilling without cracking
✓Metal drilling without burrs or recast layer

Compatible Materials

Stainless Steel, Titanium, Copper

Fuel injector nozzles, cooling holes

Glass (Borosilicate, Fused Silica)

Microfluidic inlets, TGV (Through Glass Vias)

Sapphire

Watch crystals, optical components

Ceramics (Al₂O₃, ZrO₂)

High-temperature sensors

Polymers (PEEK, PMMA)

Medical devices, microfluidics

Diamond-coated tools

Tool manufacturing

Applications

Automotive & Aerospace

  • •Fuel injector nozzles
  • •Cooling hole arrays in turbine blades
  • •Sensor apertures

Medical Devices

  • •Catheter side ports
  • •Needle beveling with micro-holes
  • •Drug delivery systems

Microfluidics

  • •Lab-on-chip inlet/outlet ports
  • •Through-glass vias (TGV)
  • •Microreactor channels

Watchmaking

  • •Ruby bearing drilling
  • •Sapphire crystal holes
  • •Precision gear holes

Technology Comparison

ParameterFemtosecond LaserMechanical DrillNanosecond Laser
Minimum Hole Size1 μm50 μm (tool limit)10 μm
Aspect Ratio100:110:120:1
Taper Angle0° (cylindrical)2-5°3-10°
Glass DrillingNo crackingHigh crack riskCracking common
Tool WearNoneConsumableNone

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